Details
Microsystem Technology
1. Aufl.
|
219,99 € |
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| Verlag: | Wiley-VCH |
| Format: | |
| Veröffentl.: | 11.07.2008 |
| ISBN/EAN: | 9783527613014 |
| Sprache: | englisch |
| Anzahl Seiten: | 512 |
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Beschreibungen
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
General Introduction to Microstructure Technology<br> The Parallels to Microelectrics<br> The Basis and Materials in Microtechnology<br> Basic Principles of Vacuum Technology<br> Litography<br> The Silicon Micromechanics<br> The LIGA Process<br> Alternative Process of Microstructuring<br> Construction and Junction Techniques (CJT)<br> System Technology
"...written by excellent experts in the field and gives a very deep and wide introduction to this important technology. The Text includes may practical examples already realized, and many details for the fabrication processes are explained. I can recommend this book without any restrictions tp engineers as well as physicists, and other scientists in this field." Optik
<p><b>Wolfgang Menz</b> is the author of <i>Microsystem Technology</i>, published by Wiley.</p> <p><b>Jürgen Mohr</b> is the author of <i>Microsystem Technology</i>, published by Wiley.</p> <p><b>Oliver Paul</b> is the author of <i>Microsystem Technology</i>, published by Wiley.</p>
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